I'd like to bet that it's a non invertable matrix  because, for example
if E12 contains the value 3, the matrix 'temprate' you're trying to
invert is 4 x 4 with zeroes all along the bottom and right hand side.
(Changing the bottom right member from 0 to 1 changed the error to
'Type mismatch', and worked on the sheet too.)

Try setting
Option Base 1
or ReDim temprate(q-1,q-1)
(along with the other arrays)

I didn't solve the type mismatch though, but you should be one step
further..

Also I ran into 'Unable to get the MMult property..' which I suspect
is solvable by
Application.WorksheetFunction.Transpose(Extrate)
instead of
Extrate
in the bothersome line.

because MMULT requires that 'the number of columns in array1 must be
the same as the number of rows in array2', and I *think* that vba
sees array2 as a single row horizontal array.

THEN I get the type mismatch again...

Running out of time now, one shot in the dark though; does this need
to be a loop? Would
results() = Application.Worksh....
work rather than
results(k) = Application.Worksh...
?